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Publication Title | Design, Fabrication, and Testing of a MEMS Microturbine

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Journal of Mechanical Sczence and Technology, Vol 19, No 2, pp 682~ 691, 2005

Design, Fabrication, and Testing of a MEMS Microturbine

Byung Sun Jeon

Research Engineer, Hyundat Motor Company,

Jangduk Dong 772 1, Whasung Si, Gyunggi-Do 445-706, Korea

Kun Joong Park

Graduate Student, School of Mechamcal and Aerospace Engmeer~ng, Scout Nattonat University, Shmhrn-Dong, Kwanak-Gu, Scout 151-742, Korea

Seung Jin Song*

Associate Professor, School of Mechanical and Aerospace Engineering, Seouf Narwhal Untversity, Shintim-Dong, Kwanak-Gu, Seoul 151-742, Korea

Young Chang Joo

Assistant Professor, School of Materials Science and Engineering, Seout National University, Shintim Dong, Kwanak Gu, Seoul 151 742, Korea

Kyoung Doug Min

Associate Professor, School of Mechanical and Aerospace Engineering, Seoul National University, Shmhm-Dong, Kwanak-Gu, Seoul 151-742, Korea

This pape~ describes the destgn, fabrication, and testing of a mlcroturbme developed at Seoul Natmnal Umverslty Here, the term "mlcroturbme" refers to a radial turbine with a diameter on the order of a centimeter Such devices can be used to transmit power for various systems The tulbme is designed using a commercial CFD code, and it has a design flow coefficient of 0 238 and work coefficient of 0 542 It has 31 stator blades and 24 rotor blades A hydrodynamic journal bearing and hydrostatic thrust bearings counteract radial and axial forces on the rotor The test turbine consists of a stack of five wafers and is fabrtcated by MEMS technology, using photohthography, DRIE, and bonding processes The first, second, fourth, and fifth layers contain plumbing, and hydrostatic axial thrust bearings for the turbine The thtrd wafer contams the turbine's stator, rotor, and hydrodynamic journal bearings Furthermore, a turbine test faclhty containing a flow control system and mstrumentatmn has been designed and constructed In performance tests, a maxmmm rotatmn speed of 11,400 rpm and flow rate of 16,000 seem have been achieved

Key Words : Mlcroturbme, Micro Power System, High Aspect Ratio, DRIE, St Direct Bonding

Nomenclature

C Chord length

Cp Specific heat of constant pressure t(n. Knudsen number

*Cmrespondmg Author,

E-mail sjsong@sunackr

TEL +82-2-880-1667, FAX +82-2-883-0179 Associate Professor, School of Mechamcal and Aero- space Engineering, Scout Nauonal Umvers~ty,Shmhm- Dong, Kwanak-Gu, Seoul 151-742,Korea (Manuscript Recelved May 3, 2004,Revlsed December20, 2004)

L . Characteristic length

M Mach number

P . Pressure

R Gas constant, turbine reaction s Blade pitch

Z Temperature

U. Rotattonal velocity V Absolute velocity V' Relative velocEty

v ' Tangentlal veloctty W Radial veloctty

Copyright (C) 2005 NuriMedia Co., Ltd.

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